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Raman analysis of Si–C–N films grown by reactive magnetron sputtering
E.J. Liang, J.W. Zhang, J. Leme, C. Moura, L. CunhaVolume:
469-470
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.09.002
File:
PDF, 417 KB
english, 2004