Characterization of SiO2/SiC Interfaces Annealed in N2O or...

Materials Science Forum 2014 / 2 Vol. 778-780

Characterization of SiO2/SiC Interfaces Annealed in N2O or POCl3

Fiorenza, Patrick, Swanson, Lukas K., Vivona, Marilena, Giannazzo, Filippo, Bongiorno, Corrado, Lorenti, Simona, Frazzetto, Alessia, Roccaforte, Fabrizio
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Volume:
778-780
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.778-780.623
Date:
February, 2014
File:
PDF, 329 KB
english, 2014
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