Role of atomic hydrogen density and energy in low power...

Thin Solid Films 2005 Vol. 478; Iss. 1-2

Role of atomic hydrogen density and energy in low power chemical vapor deposition synthesis of diamond films

Randell Mills, Jayasree Sankar, Andreas Voigt, Jiliang He, Paresh Ray, Bala Dhandapani
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Volume:
478
Year:
2005
Language:
english
Pages:
14
DOI:
10.1016/j.tsf.2004.10.009
File:
PDF, 558 KB
english, 2005
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