![](/img/cover-not-exists.png)
Reactive magnetron sputtering of copper, silver, and gold
J.F. Pierson, D. Wiederkehr, A. BillardVolume:
478
Year:
2005
Language:
english
Pages:
10
DOI:
10.1016/j.tsf.2004.10.043
File:
PDF, 901 KB
english, 2005