Comparative study of the structure of a-CNx and a-CNx:H...

Thin Solid Films 2005 Vol. 482; Iss. 1-2

Comparative study of the structure of a-CNx and a-CNx:H films using NEXAFS, XPS and FT-IR analysis

B. Bouchet-Fabre, K. Zellama, C. Godet, D. Ballutaud, T. Minéa
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Volume:
482
Year:
2005
Language:
english
Pages:
11
DOI:
10.1016/j.tsf.2004.11.134
File:
PDF, 330 KB
english, 2005
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