A model for stress generation and stress relief mechanisms...

Thin Solid Films 2005 Vol. 482; Iss. 1-2

A model for stress generation and stress relief mechanisms applied to as-deposited filtered cathodic vacuum arc amorphous carbon films

M.M.M. Bilek, M. Verdon, L. Ryves, T.W.H. Oates, C.T. Ha, D.R. McKenzie
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Volume:
482
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.11.159
File:
PDF, 195 KB
english, 2005
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