Surface-modified polymeric pads for enhanced performance during chemical mechanical planarization
S. Deshpande, S. Dakshinamurthy, S.C. Kuiry, R. Vaidyanathan, Y.S. Obeng, S. SealVolume:
483
Year:
2005
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2004.12.063
File:
PDF, 357 KB
english, 2005