Influence of laser annealing on hydrogen bonding in...

Thin Solid Films 2005 Vol. 487; Iss. 1-2

Influence of laser annealing on hydrogen bonding in compensated polycrystalline silicon thin films

R. Saleh, N.H. Nickel, K.V. Maydell
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Volume:
487
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.01.042
File:
PDF, 111 KB
english, 2005
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