Characterization of rf sputtered TiOySz thin films

Characterization of rf sputtered TiOySz thin films

Marie-Hélène Lindic, Brigitte Pecquenard, Philippe Vinatier, Alain Levasseur, Hervé Martinez, Danielle Gonbeau, Pierre-Emmanuel Petit, Guy Ouvrard
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Volume:
484
Year:
2005
Language:
english
Pages:
11
DOI:
10.1016/j.tsf.2005.02.014
File:
PDF, 621 KB
english, 2005
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