Characterization of rf sputtered TiOySz thin films
Marie-Hélène Lindic, Brigitte Pecquenard, Philippe Vinatier, Alain Levasseur, Hervé Martinez, Danielle Gonbeau, Pierre-Emmanuel Petit, Guy OuvrardVolume:
484
Year:
2005
Language:
english
Pages:
11
DOI:
10.1016/j.tsf.2005.02.014
File:
PDF, 621 KB
english, 2005