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Single-Step UV Nanoimprinting Lithography with Multi-Head Imprinting System and Its Applications
Lee, Jae Jong, Lee, Seung Woo, Cho, Hyun Taek, Kim, Gee Hong, Choi, Kee BongVolume:
326-328
Year:
2006
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.326-328.441
File:
PDF, 1.73 MB
english, 2006