Low temperature chemical vapor deposition of Co thin films...

Thin Solid Films 2005 Vol. 485; Iss. 1-2

Low temperature chemical vapor deposition of Co thin films from Co2(CO)8

D.-X. Ye, S. Pimanpang, C. Jezewski, F. Tang, J.J. Senkevich, G.-C. Wang, T.-M. Lu
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Volume:
485
Year:
2005
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2005.03.046
File:
PDF, 269 KB
english, 2005
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