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Growth of Thick Epitaxial 4H-SiC Layers by Chemical Vapor Deposition
Kordina, Olle, Irvine, Kenneth G., Sumakeris, Joseph J., Kong, H.S., Paisley, Michael J., Carter Jr., Calvin H.Volume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.107
File:
PDF, 380 KB
1998