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Investigation on the Dressing Shape of Vacuum Chuck in Wafer Rotation Grinding
Gao, Hang, Tian, Y.B., Jia, Zhen Yuan, Kang, Ren KeVolume:
291-292
Year:
2005
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.291-292.171
File:
PDF, 305 KB
english, 2005