Imaging Structure and Composition Homogeneity of 300 mm...

ACS Applied Materials & Interfaces 2015 / 05 Vol. 7; Iss. 17

Imaging Structure and Composition Homogeneity of 300 mm SiGe Virtual Substrates for Advanced CMOS Applications by Scanning X-ray Diffraction Microscopy

Zoellner, Marvin H., Richard, Marie-Ingrid, Chahine, Gilbert A., Zaumseil, Peter, Reich, Christian, Capellini, Giovanni, Montalenti, Francesco, Marzegalli, Anna, Xie, Ya-Hong, Schülli, Tobias U., Häbe
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Volume:
7
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am508968b
Date:
May, 2015
File:
PDF, 3.71 MB
english, 2015
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