X-ray reflectivity study of radio frequency sputtered silicon oxide on silicon
D.M. Solina, R.W. Cheary, W. Kalceff, G. McCredieVolume:
489
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.04.092
File:
PDF, 331 KB
english, 2005