Quartz crystal microbalance study of tungsten atomic layer...

Thin Solid Films 2005 Vol. 488; Iss. 1-2

Quartz crystal microbalance study of tungsten atomic layer deposition using WF6 and Si2H6

F.H. Fabreguette, Z.A. Sechrist, J.W. Elam, S.M. George
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Volume:
488
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2005.04.114
File:
PDF, 223 KB
english, 2005
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