Depth profile characterization of electrodeposited multi-thin-film structures by low angle of incidence X-ray diffractometry
M. Nauer, K. Ernst, W. Kautek, M. Neumann-SpallartVolume:
489
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2005.05.008
File:
PDF, 682 KB
english, 2005