Deposition of Cu thin films from supercritical carbon...

Thin Solid Films 2005 Vol. 491; Iss. 1-2

Deposition of Cu thin films from supercritical carbon dioxide using hexafluoroacetylacetnatecopper

E. Kondoh, K. Shigama
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Volume:
491
Year:
2005
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2005.06.005
File:
PDF, 249 KB
english, 2005
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