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[ECS 212th ECS Meeting - Washington, DC (October 7 - October 12, 2007)] ECS Transactions - Characterization of Pinhole in Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Microscopy
Wu, Xing, Uchikoshi, Junichi, Hirokane, Takaaki, Yamada, Ryuta, Arima, Kenta, Morita, MizuhoVolume:
11
Year:
2007
Language:
english
DOI:
10.1149/1.2778659
File:
PDF, 444 KB
english, 2007