Low-temperature fabrication of silicon films by large-area...

Thin Solid Films 2006 Vol. 498; Iss. 1-2

Low-temperature fabrication of silicon films by large-area microwave plasma enhanced chemical vapor deposition

Jian-De Gu, Pei-Li Chen
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Volume:
498
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2005.07.055
File:
PDF, 745 KB
english, 2006
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