Effects of acetylene on property of plasma amorphous carbon...

Effects of acetylene on property of plasma amorphous carbon films

S.P. Louh, C.H. Wong, M.H. Hon
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Volume:
498
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.07.099
File:
PDF, 325 KB
english, 2006
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