In situ FTIR investigation of the effect of gas-phase reaction on the deposition of Pb(Zr,Ti)O3 films by MOCVD
Gouji Asano, Tsukasa Satake, Kunio Ohtsuki, Hiroshi FunakuboVolume:
498
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.07.126
File:
PDF, 264 KB
english, 2006