Crystallization of HWCVD amorphous silicon thin films at elevated temperatures
Theo F.G. Muller, Dirk Knoesen, Chris Arendse, Ryno Swanepoel, Sylvain Halindintwali, Chris TheronVolume:
501
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.07.133
File:
PDF, 157 KB
english, 2006