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Measurement of residual stress and elastic modulus of polycrystalline 3C-SiC films deposited by low-pressure chemical vapor deposition
Xiao-an Fu, Jeremy L. Dunning, Christian A. Zorman, Mehran MehreganyVolume:
492
Year:
2005
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2005.07.236
File:
PDF, 225 KB
english, 2005