Low-temperature growth of Si-based organic–inorganic hybrid materials, Si–O–C and Si–N–C, by organic Cat-CVD
Hiroshi Nakayama, Tsuyoshi HataVolume:
501
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.07.239
File:
PDF, 660 KB
english, 2006