Electrical Property of TiO2 Thin Film Deposited by RF Sputtering
Niizuma, Kiyozumi, Hayakawa, Takahiro, Utsushikawa, YoshioVolume:
127
Year:
2007
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.127.221
File:
PDF, 364 KB
english, 2007