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Oxygen atom density in rare gas diluted O2 radio frequency plasma
Takeshi Kitajima, Junta Nakashima, Toshiki Nakano, Toshiaki MakabeVolume:
506-507
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.08.091
File:
PDF, 154 KB
english, 2006