Germanium Surface Passivation Using Ozone Gaseous Phase
Loup, Virginie, Besson, Pascal, Pollet, Olivier, Martinez, Eugénie, Richard, Emmanuelle, Lhostis, SandrineVolume:
134
Year:
2008
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.134.37
File:
PDF, 291 KB
english, 2008