Porous silicon microstructure and composition...

Thin Solid Films 2006 Vol. 495; Iss. 1-2

Porous silicon microstructure and composition characterization depending on the formation conditions

T.I. Gorbanyuk, A.A. Evtukh, V.G. Litovchenko, V.S. Solnsev, E.M. Pakhlov
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Volume:
495
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.08.188
File:
PDF, 902 KB
english, 2006
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