Functional nanostructured titanium nitride films obtained by sputtering magnetron
O. Sánchez, M. Hernández-Vélez, D. Navas, M.A. Auger, J.L. Baldonedo, R. Sanz, K.R. Pirota, M. VázquezVolume:
495
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.08.203
File:
PDF, 374 KB
english, 2006