Functional nanostructured titanium nitride films obtained...

Functional nanostructured titanium nitride films obtained by sputtering magnetron

O. Sánchez, M. Hernández-Vélez, D. Navas, M.A. Auger, J.L. Baldonedo, R. Sanz, K.R. Pirota, M. Vázquez
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Volume:
495
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.08.203
File:
PDF, 374 KB
english, 2006
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