Vapor infiltration techniques for spin-on mesoporous silica...

Thin Solid Films 2006 Vol. 495; Iss. 1-2

Vapor infiltration techniques for spin-on mesoporous silica films

Shunsuke Tanaka, Hiromi Tada, Takanori Maruo, Norikazu Nishiyama, Yasuyuki Egashira, Korekazu Ueyama
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Volume:
495
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.08.218
File:
PDF, 116 KB
english, 2006
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