Crosslinking impact of mesoporous MSQ films used in...

Thin Solid Films 2006 Vol. 495; Iss. 1-2

Crosslinking impact of mesoporous MSQ films used in microelectronic interconnections on mechanical properties

F. Ciaramella, V. Jousseaume, S. Maitrejean, M. Verdier, B. Remiat, A. Zenasni, G. Passemard
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Volume:
495
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2005.08.291
File:
PDF, 372 KB
english, 2006
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