Silicon photodetectors integrated with vertical silicon...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2014 / 05 Vol. 32; Iss. 3

Silicon photodetectors integrated with vertical silicon nitride waveguides as image sensor pixels: Fabrication and characterization

Tut, Turgut, Dan, Yaping, Duane, Peter, Ye, Winnie N., Degirmenci, Fatih, Yu, Young, Wober, Munib, Crozier, Kenneth B.
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4868627
Date:
May, 2014
File:
PDF, 2.28 MB
english, 2014
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