Stress formation in evaporated amorphous Ge–Se and Ge–Se–Ga(Tl, B) thin films
C. Popov, S. Boycheva, P. Petkov, Y. Nedeva, B. Monchev, S. ParvanovVolume:
496
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2005.08.365
File:
PDF, 194 KB
english, 2006