Stress formation in evaporated amorphous Ge–Se and...

Stress formation in evaporated amorphous Ge–Se and Ge–Se–Ga(Tl, B) thin films

C. Popov, S. Boycheva, P. Petkov, Y. Nedeva, B. Monchev, S. Parvanov
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Volume:
496
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2005.08.365
File:
PDF, 194 KB
english, 2006
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