Interaction between abrasive particles and films during...

Interaction between abrasive particles and films during chemical-mechanical polishing of copper and tantalum

Ying Li, Junzi Zhao, Ping Wu, Yong Lin, S.V. Babu, Yuzhuo Li
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Volume:
497
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.tsf.2005.09.189
File:
PDF, 322 KB
english, 2006
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