Electrical properties of B-doped polycrystalline silicon...

Thin Solid Films 2006 Vol. 497; Iss. 1-2

Electrical properties of B-doped polycrystalline silicon thin films prepared by rapid thermal chemical vapour deposition

Bin Ai, Hui Shen, Zongcun Liang, Zhi Chen, Guanglin Kong, Xianbo Liao
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Volume:
497
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2005.10.069
File:
PDF, 231 KB
english, 2006
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