Growth and characterization of piezoelectric AlN thin films for diamond-based surface acoustic wave devices
M. Benetti, D. Cannatà, F. Di Pietrantonio, E. Verona, A. Generosi, B. Paci, V. Rossi AlbertiniVolume:
497
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.10.073
File:
PDF, 157 KB
english, 2006