Deposition of titanium/titanium oxide clusters produced by...

Thin Solid Films 2006 Vol. 500; Iss. 1-2

Deposition of titanium/titanium oxide clusters produced by magnetron sputtering

Ibrahimkutty Shyjumon, Manesh Gopinadhan, Christiane A. Helm, Boris M. Smirnov, Rainer Hippler
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Volume:
500
Year:
2006
Language:
english
Pages:
11
DOI:
10.1016/j.tsf.2005.11.006
File:
PDF, 447 KB
english, 2006
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