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Successive deposition of layered titanium oxide/indium tin oxide films on unheated substrates by twin direct current magnetron sputtering
Kee-Rong Wu, Chieh-Hung Ting, Wu-Chien Liu, Chao-Hsien Lin, Jiing-Kae WuVolume:
500
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2005.11.035
File:
PDF, 631 KB
english, 2006