Effect of hydrogen on the low-temperature growth of...

Thin Solid Films 2006 Vol. 513; Iss. 1-2

Effect of hydrogen on the low-temperature growth of polycrystalline silicon film deposited by SiCl4/H2

Rui Huang, Xuanying Lin, Wenyong Huang, Ruohe Yao, Yunpeng Yu, Kuixun Lin, Junhong Wei, Zusong Zhu
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Volume:
513
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.11.036
File:
PDF, 251 KB
english, 2006
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