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Dominant Forces for Driving Bubbles in a Wet Cleaning Bath Using Megasonic Wave
Habuka, Hitoshi, Fukumoto, Ryohei, Okada, Yuta, Kato, MasayukiVolume:
157
Year:
2010
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3365114
File:
PDF, 515 KB
english, 2010