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Comparative study of the electrical properties of diamond films grown by microwave plasma assisted and hot-filament chemical vapor deposition
J.C. Madaleno, G. Cabral, E. Titus, L. Pereira, J. Grácio, N. AliVolume:
515
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2005.12.049
File:
PDF, 294 KB
english, 2006