Characterization of a large area scanning PECVD deposition...

Thin Solid Films 2006 Vol. 515; Iss. 1

Characterization of a large area scanning PECVD deposition system with small size RF electrodes

Y. Yin, L. Hang, M. Proschek, D.R. McKenzie, M.M.M. Bilek, S. Allan, J. Han, S. Rubanov, R.D.T. Lauder, R.B. Godfrey
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Volume:
515
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2005.12.082
File:
PDF, 140 KB
english, 2006
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