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Composition, surface morphology and electrical characteristics of Al2O3–TiO2 nanolaminates and AlTiO films on silicon
V. Mikhelashvili, G. EisensteinVolume:
515
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2005.12.097
File:
PDF, 288 KB
english, 2006