Effect of nitrogen addition on the properties and thermal stability of fluorinated amorphous carbon films
Chia-Han Lai, Wei-Shun Lai, Hua-Chun Chiue, Hung-Jen Chen, Shou-Yi Chang, Su-Jien LinVolume:
510
Year:
2006
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2005.12.274
File:
PDF, 316 KB
english, 2006