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Influence of Target Current on the Structure of Ti-Doped DLC Films
Wang, Cheng Biao, Fu, Zhi Qiang, Yue, Wen, Peng, Zhi Jian, Yu, Xiang, Lin, Song Sheng, Dai, Ming JiangVolume:
105-106
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/amr.105-106.451
Date:
April, 2010
File:
PDF, 607 KB
english, 2010