Sputter-assisted plasma CVD of polymer-like amorphous CNx:H films using supermagnetron plasma
Haruhisa Kinoshita, Ryo Ikuta, Katsutoshi SakuraiVolume:
515
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2006.02.068
File:
PDF, 219 KB
english, 2007