Sputter-assisted plasma CVD of polymer-like amorphous CNx:H...

Sputter-assisted plasma CVD of polymer-like amorphous CNx:H films using supermagnetron plasma

Haruhisa Kinoshita, Ryo Ikuta, Katsutoshi Sakurai
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
515
Year:
2007
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2006.02.068
File:
PDF, 219 KB
english, 2007
Conversion to is in progress
Conversion to is failed