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Charge trapping and carrier transport mechanism in silicon-rich silicon oxynitride
Zhenrui Yu, Mariano Aceves, Jesus Carrillo, Rosa López-EstopierVolume:
515
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2006.04.009
File:
PDF, 347 KB
english, 2006