The ion energy distributions and ion flux composition from...

Thin Solid Films 2006 Vol. 515; Iss. 4

The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge

J. Bohlmark, M. Lattemann, J.T. Gudmundsson, A.P. Ehiasarian, Y. Aranda Gonzalvo, N. Brenning, U. Helmersson
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Volume:
515
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2006.04.051
File:
PDF, 274 KB
english, 2006
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