Catalytic Forming Gas Anneal on III-V/Ge MOS Systems

MRS Proceedings 2009 / 1 Vol. 1194

Catalytic Forming Gas Anneal on III-V/Ge MOS Systems

Wang, Wei-E, Lin, Han-Chung, Brammertz, Guy, Delabie, Annelies, simoen, eddy, Caymax, Matty, Meuris, Marc, Heyns, Marc
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Volume:
1194
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1194-A07-06
Date:
January, 2009
File:
PDF, 247 KB
english, 2009
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